Semiconductor arrangement and formation thereof

ABSTRACT

A semiconductor arrangement and method of forming the same are described. A semiconductor arrangement includes a third metal connect in contact with a first metal connect in a first active region and a second metal connect in a second active region, and over a shallow trench isolation region located between the first active region and a second active region. A method of forming the semiconductor arrangement includes forming a first opening over the first metal connect, the STI region, and the second metal connect, and forming the third metal connect in the first opening. Forming the third metal connect over the first metal connect and the second metal connect mitigates RC coupling.

RELATED APPLICATION

This application is a continuation of and claims priority to U.S. patentapplication Ser. No. 15/693,676, titled “SEMICONDUCTOR ARRANGEMENT ANDFORMATION THEREOF” and filed on Sep. 1, 2017, which is a continuation ofand claims priority to U.S. patent application Ser. No. 15/362,746,titled “SEMICONDUCTOR ARRANGEMENT AND FORMATION THEREOF” and filed onNov. 28, 2016, which is a divisional of and claims priority to U.S.patent application Ser. No. 14/148,172, titled “SEMICONDUCTORARRANGEMENT AND FORMATION THEREOF” and filed on Jan. 6, 2014. U.S.patent applications Ser. Nos. 15/693,676, 15/362,746 and 14/148,172 areincorporated herein by reference.

BACKGROUND

In a semiconductor device, current flows through a channel regionbetween a source region and a drain region upon application of asufficient voltage or bias to a gate of the device. When current flowsthrough the channel region, the device is generally regarded as being inan ‘on’ state, and when current is not flowing through the channelregion, the device is generally regarded as being in an ‘off’ state.

DESCRIPTION OF THE DRAWINGS

FIG. 1 is a flow diagram illustrating a method of forming asemiconductor arrangement, according to some embodiments.

FIG. 2 is an illustration of a semiconductor arrangement, according tosome embodiments.

FIG. 3 is an illustration of a semiconductor arrangement, according tosome embodiments.

FIG. 4 is an illustration of a semiconductor arrangement, according tosome embodiments.

FIG. 5 is an illustration of a semiconductor arrangement, according tosome embodiments.

FIG. 6 is an illustration of a semiconductor arrangement, according tosome embodiments.

FIG. 7 is an illustration of a semiconductor arrangement, according tosome embodiments.

FIG. 8 is an illustration of a semiconductor arrangement, according tosome embodiments.

FIG. 9 is an illustration of a semiconductor arrangement, according tosome embodiments.

FIG. 10 is an illustration of a semiconductor arrangement, according tosome embodiments.

FIG. 11 is an illustration of a semiconductor arrangement, according tosome embodiments.

FIG. 12 is an illustration of a semiconductor arrangement, according tosome embodiments.

FIG. 13 is an illustration of a semiconductor arrangement, according tosome embodiments.

FIG. 14 is an illustration of a semiconductor arrangement, according tosome embodiments.

FIG. 15 is an illustration of a semiconductor arrangement, according tosome embodiments.

FIG. 16 is an illustration of a semiconductor arrangement, according tosome embodiments.

FIG. 17 is an illustration of a semiconductor arrangement, according tosome embodiments.

DETAILED DESCRIPTION

The claimed subject matter is now described with reference to thedrawings, wherein like reference numerals are generally used to refer tolike elements throughout. In the following description, for purposes ofexplanation, numerous specific details are set forth in order to providean understanding of the claimed subject matter. It is evident, however,that the claimed subject matter may be practiced without these specificdetails. In other instances, structures and devices are illustrated inblock diagram form in order to facilitate describing the claimed subjectmatter.

According to some embodiments, a semiconductor arrangement comprises afirst active region, a second active region and a shallow trenchisolation (STI) region, the STI region between the first active regionand the second active region. According to some embodiments, a firstmetal connect is over the first active region and connected to the firstactive region. According to some embodiments, a second metal connect isover a second active region and connected to the second active region.In some embodiments, a third metal connect is over the first metalconnect, the STI region and the second metal connect, and connected tothe first metal connect and the second metal connect such that the thirdmetal connect connects the first metal connect to the second metalconnect. In some embodiments, the first active region is one of a sourceor a drain. In some embodiments, the second active region is one of asource or a drain. In some embodiments, the third metal connect connectsat least one of a source of the first active region to a source of thesecond active region, a drain of the first active region to a drain ofthe second active region, or a source of the first active region to adrain of the second active region. In some embodiments, the third metalconnect mitigates resistance-capacitance (RC) coupling because adistance between the third metal connect and a gate associated with thesemiconductor arrangement is greater than a distance between the gateand a different metal connect that would otherwise be used to connectthe first active region to the second active region, such as a differentmetal connect that is not over the first metal connect, the STI regionand the second metal connect. In some embodiments, a reduced orminimized RC coupling between the gate and a metal connect, such as thethird metal connect, that connects the first active region to the secondactive region results in at least one of reduced resistance-capacitance(RC) delay or better performance, wherein better performance comprisesat least one of improved speed or operative predictability.

According to some embodiments, forming a semiconductor arrangementcomprises forming a first opening over a first active region, a shallowtrench isolation (STI) region and a second active region, such that thefirst opening is over a first metal connect in the first active regionand is over a second metal connect in the second active region.According to some embodiments, a third metal connect is formed in thefirst opening such that the third metal connect connects the first metalconnect to the second metal connect. In some embodiments, as secondopening is formed over a gate in the STI region. In some embodiments, ametal contact is formed in the second opening. In some embodiments, thefirst opening and the second opening are formed concurrently. In someembodiments, the first metal connect has a third height and the secondmetal connect has a fourth height, the third height substantially equalto the fourth height. In some embodiments, the gate has fifth height,the fifth height substantially equal to the third height. In someembodiments, the third metal connect, which is over the first metalconnect and the second metal connect, has a first height.

A method 100 of forming a semiconductor arrangement 200 according tosome embodiments is illustrated in FIG. 1 and one or more structuresformed thereby at various stages of fabrication are illustrated in FIGS.2-17. According to some embodiments, such as illustrated in FIG. 16, thesemiconductor arrangement 200 comprises a first active region 205, asecond active region 207 and a shallow trench isolation (STI) region209, the STI region 209 between the first active region 205 and thesecond active region 207. According to some embodiments, a first metalconnect 215 is over the first active region 205 and connected to thefirst active region 205. According to some embodiments, a second metalconnect 216 is over the second active region 207 and connected to thesecond active region 207. In some embodiments, a third metal connect 218is over the first metal connect 215, the STI region 209 and the secondmetal connect 216, and connected to the first metal connect 215 and thesecond metal connect 216, such that the third metal connect 218 connectsthe first metal connect 215 to the second metal connect 216 therebyconnecting the first active region 205 to the second active region 207.

Turning to FIG. 2 an overview or top down view of the semiconductorarrangement 200 is illustrated according to some embodiments, where asecond dielectric layer 224 illustrated in FIGS. 3-15 is not shown inFIG. 2 so that features underlying the second dielectric layer 224 arevisible in FIG. 2. In FIG. 2 four lines 240, 242, 244 and 246 are drawnto illustrate cross-sections that are depicted in other FIGS. A firstline 240 cuts through the second active region 207, multiple gates 208,the second metal connect 216 and the third metal connect 218, where thesecond active region 207 is a region where as at least one of a sourceor a drain are formed, according to some embodiments. FIG. 15 is a crosssectional view of the semiconductor arrangement 200 taken along thefirst line 240 at a latter stage of fabrication. A second line 242 cutsthrough the STI region 209, the multiple gates 208, multiple metalcontacts 214 and the third metal connect 218, where the STI region 209comprises STI 220. FIGS. 3, 5, 7, 9, 11 and 13 are cross sectional viewsof the semiconductor arrangement 200 taken along the second line 242 atvarious stages of fabrication. A third line 244 cuts through the firstactive region 205, the multiple gates 208, the first metal connect 215and the third metal connect 218, where the first active region 205 is aregion where as at least one of a source or a drain are formed,according to some embodiments. FIGS. 4, 6, 8, 10, 12 and 14 are crosssectional views of the semiconductor arrangement 200 taken along thethird line 244 at various stages of fabrication. A fourth line 246, cutsthrough the first metal connect 215, the third metal connect 218 and thesecond metal connect 216, according to some embodiments, where the thirdmetal connect 218 is formed to connect the first active region 205 tothe second active region 207. FIG. 16 is a cross sectional view of thesemiconductor arrangement 200 taken along the fourth line 246 at alatter stage of fabrication.

At 102, a second opening 226 is formed over a gate 208 in the STI region209, as illustrated in FIG. 5. Turning to FIG. 3, which illustrates across-section of the second line 242 of FIG. 2, where the second line242 cuts through the STI region 209. The semiconductor arrangement 200comprises a substrate 202. In some embodiments, the substrate 202comprises at least one of silicon oxide or silicon nitride. According tosome embodiments, the substrate 202 comprises at least one of anepitaxial layer, a silicon-on-insulator (SOI) structure, a wafer, or adie formed from a wafer. In some embodiments, an STI 220 is formed overthe substrate 202 in the STI region 209. In some embodiments, the STI220 comprises a dielectric material, such as silicon oxide (SiO₂). Insome embodiments, the STI 220 formation comprises deposition of thedielectric material. In some embodiments, the STI region 209 comprisesthe STI 220. In some embodiments, the STI 220 has a thickness betweenabout 20 nm to about 70 nm. Turning to FIG. 4, which illustrates across-section of the third line 244 of FIG. 2, where the third line 244cuts through the first active region 205. In some embodiments, one ormore fins 204 are formed in the substrate 202 of the first active region205. In some embodiments, the one or more fins 204 comprise the samematerial as the substrate 202. In some embodiments, the one or more fins204 have a height between 5 nm to about 45 nm. In some embodiments, anepitaxial (Epi) cap 206 is formed over the one or more fins 204. In someembodiments, the Epi cap 206 is grown. In some embodiments, the Epi cap206 comprises at least one of silicon, nitride, or oxide. In someembodiments, the second active region 207 is formed substantially thesame way as the first active region 205. In some embodiments, a firstdielectric layer 212 is formed, such as by deposition, over the STI 220and the Epi cap 206, as illustrated in FIGS. 3, 4 and 17. In someembodiments, the Epi cap 206 a comprises at least one of a source or adrain. In some embodiments, the Epi cap 206 b comprises a source if theEpi cap 206 a comprises a drain, and the Epi cap 206 b comprises a drainif the Epi cap 206 a comprises a source. In some embodiments, the firstdielectric layer 212 comprises a standard dielectric material with amedium or low dielectric constant, such as SiO₂. In some embodiments,the first dielectric layer 212 has thickness between about 20 nm toabout 150 nm. In some embodiments, the gate 208, or a plurality of gates208, as illustrated in FIGS. 3 and 4, are formed in the first dielectriclayer 212, such that the gate 208 is in contact with the Epi cap 206 ofthe first active region 205 and the Epi cap 206 of the second activeregion 207 and over the STI region 209. In some embodiments, the gate208 comprises a layer of high dielectric constant material in contactwith the Epi cap 206 of the first active region 205 and the secondactive region 207, as illustrated in FIGS. 4 and 17. In someembodiments, the high dielectric constant material comprises at leastone of nitride or oxide. In some embodiments, the gate 208 comprises aconductive material, such as metal, formed, such as by deposition, overthe high dielectric constant material. In some embodiments, a hard mask210 is formed, such as by deposition, over the gate 208. In someembodiments, the gate 208 has a fifth height 225 between about 20 nm toabout 130 nm. In some embodiments, the hard mask 210 comprises oxide ornitride. In some embodiments, the first metal connect 215 is in contactwith the Epi cap 206 b in the first active region 205. In someembodiments, the Epi cap 206 a is in contact with the first metalconnect 215 (not shown). In some embodiments, the first metal connect215 comprises a conductive material such as at least one of metal orpolysilicon. In some embodiments, the first metal connect 215 formationcomprises deposition. In some embodiments, the first metal connect 215has a third height 221 between about 30 nm to about 130 nm, asillustrated in FIG. 4. In some embodiments, the second metal connect 216has a fourth height 223, as illustrated in FIG. 15, substantially equalto the third height 221. In some embodiments, the fifth height 225 ofthe gate 208 is substantially equal to the third height 221. In someembodiments, an etch stop layer 222 is formed over the hard mask 210,the first dielectric layer 212 and the first metal connect 215, such asby deposition. In some embodiments, the etch stop layer 222 comprises atleast one of silicon, nitride or oxide. In some embodiments, the secondmetal connect 216 is in contact with the Epi cap 206 b in the secondactive region 207. In some embodiments, the second metal connect 216 isformed in substantially the same manner as the first metal connect 215.In some embodiments, a second dielectric layer 224 is formed over theetch stop layer 222. In some embodiments, the second dielectric layer224 comprises a standard dielectric material with a medium or lowdielectric constant, such as SiO₂. In some embodiments, the seconddielectric layer 224 has thickness between about 20 nm to about 150 nm.Turning to FIG. 5, the second opening 226 is formed, such as by etching,in the second dielectric layer 224, the etch stop layer 222, and thehard mask 210, such that the second opening 226 exposes at least part ofthe gate 208.

At 104, a first opening 228 is formed over the first active region 205,the STI region 209 and the second active region 207, such that the firstopening 228 is over the first metal connect 215 and the second metalconnect 216, as illustrated in FIGS. 7 and 8. In some embodiments, thefirst opening 228 is formed, such as by etching, through the seconddielectric layer 224 and the etch stop layer 222. In some embodiments,the first opening 228 is formed, such that in the first active region205 and the second active region 207 the first opening 228 exposes atleast a portion of the first metal connect 215 and at least a portion ofthe second metal connect 216. In some embodiments, the first opening 228is formed such that in the STI region 209, the first opening 228 exposesat least part of the first dielectric layer 212.

At 106, the third metal connect 218 is formed in the first opening 228and the metal contact 214 is formed into the second opening 226, asillustrated in FIGS. 13-15. Turning to FIG. 9, a first metal layer 230is formed in the first opening 228 and the second opening 226. In someembodiments, the first metal layer 230 is formed by deposition. In someembodiments, the first metal layer 230 comprises titanium. In someembodiments, the first metal layer 230 has a thickness of 1 nm to about10 nm. In some embodiments, the first metal layer 230 in the secondopening 226 is in contact with the gate 208, as illustrated in FIG. 9.In some embodiments, the first metal layer 230 in the first opening 228is in contact with the first metal connect 215 in the first activeregion 205, as illustrated in FIG. 10, and the second metal connect 216in the second active region 207, as illustrated in FIG. 15. Turning toFIGS. 11-12, which illustrates a second metal layer 232 formed over thefirst metal layer 230 in the first opening 228 and over the first metallayer 230 in the second opening 226. In some embodiments, the secondmetal layer 232 is formed by deposition. In some embodiments, the secondmetal layer 232 comprises titanium nitride. In some embodiments, thesecond metal layer 232 has a thickness of 1 nm to about 10 nm. Turningto FIGS. 13-15, which illustrates the formation of a metal fill 234 inthe first opening 228 to form the third metal connect 218 and theformation of the metal fill 234 in the second opening 226 over thesecond metal layer 232 to form the metal contact 214. In someembodiments, the metal fill 234 is formed by deposition. In someembodiments, the metal fill 234 comprises tungsten. In some embodiments,excess first metal layer 230, second metal layer 232 and metal fill 234are removed, such as by chemical mechanical planarization (CMP). Turningto FIG. 16, which illustrates a cross-section of the fourth line 246 ofFIG. 2, where the fourth line 246 cuts through the first metal connect215, the second metal connect 216 and the third metal connect 218. Insome embodiments, the third metal connect 218 has a third metal length227, the third metal length 227 substantially equal to a semiconductorarrangement length 229. In some embodiments, the semiconductorarrangement length 229 is measured from a first distal sidewall 231 b ofthe first metal connect 215 to a second distal sidewall 231 a of thesecond metal connect 216.

Turning to FIG. 17, a 3D cross-sectional view of the semiconductorarrangement is illustrated as viewed from a perspective indicated byarrows on line 17-17 in FIG. 2, where the second dielectric layer 224 isremoved. According to some embodiments, the one or more fins 204 withEpi caps 206 pass through the gate 208, such that on a first side 256 ofthe gate 208, the Epi caps 206 b comprises one of a source or a drainand on a second side 258 of the gate 208, the Epi caps 206 a comprises asource if the Epi caps 206 b comprise a drain or a drain if the Epi caps206 b comprises a source. In some embodiments, the first metal connect215 is formed around the one or more fins 204 with Epi caps 206 b in thefirst active region 205. In some embodiments, the second metal connect216 is formed around the one or fins 204 with Epi caps 206 b in thesecond active region 207. In some embodiments, the STI region 209comprises the STI 220, where the STI 220 is situated such that the STI220 separates the one or more fins 204 with Epi caps 206 in the firstactive region 205 from the one or more fins 204 with Epi caps 206 in thesecond active region 207. In some embodiments, the third metal connect218 connects the first metal connect 215 to the second metal connect216, such that the one or more fins 204 with Epi caps 206 b in the firstactive region 205 are connected to the one or more fins 204 with Epicaps 206 b in the second active region 207. In some embodiments, the Epicaps 206 b in the first active region 205 and the Epi caps 206 b in thesecond active region 207 comprise drains, and thus the third metalconnect 218 connects a first drain to a second drain. In someembodiments, the Epi caps 206 b in the first active region 205 and theEpi caps 206 b in the second active region 207 comprise sources, andthus the third metal connect 218 connects a first source to a secondsource.

According to some embodiments, a semiconductor arrangement comprises afirst active region, a second active region, and a shallow trenchisolation (STI) region between the first active region and the secondactive region. In some embodiments, a first metal connect is over thefirst active region and connected to the first active region, a secondmetal connect is over the second active region and connected to thesecond active region, and a third metal connect is over the first metalconnect, the STI region and the second metal connect. In someembodiments, the third metal connect is connected to the first metalconnect and to the second metal connect, such that the third metalconnect connects the first metal connect to the second metal connect.

According to some embodiments, a method of forming a semiconductorarrangement comprises forming a first opening over a first activeregion, a shallow trench isolation (STI) region and a second activeregion, such that the first opening is over a first metal connect in thefirst active region, and is over a second metal connect in the secondactive region. In some embodiments, forming a semiconductor arrangementcomprises forming a third metal connect in the first opening such thatthe third metal connect connects the first metal connect to the secondmetal connect.

According to some embodiments, a semiconductor arrangement comprises afirst active region, a second active region, and a shallow trenchisolation (STI) region between the first active region and the secondactive region. In some embodiments, a gate is over the first activeregion, the second active region and the STI region. In someembodiments, a first metal connect adjacent the gate is over the firstactive region and connected to the first active region, a second metalconnect adjacent the gate is over the second active region and connectedto the second active region, and a third metal connect is over the firstmetal connect, the STI region and the second metal connect. In someembodiments, the third metal connect is connected to the first metalconnect and to the second metal connect such that the third metalconnect connects the first metal connect to the second metal connect.

Although the subject matter has been described in language specific tostructural features or methodological acts, it is to be understood thatthe subject matter of the appended claims is not necessarily limited tothe specific features or acts described above. Rather, the specificfeatures and acts described above are disclosed as embodiment forms ofimplementing at least some of the claims.

Various operations of embodiments are provided herein. The order inwhich some or all of the operations are described should not beconstrued to imply that these operations are necessarily orderdependent. Alternative ordering will be appreciated having the benefitof this description. Further, it will be understood that not alloperations are necessarily present in each embodiment provided herein.Also, it will be understood that not all operations are necessary insome embodiments.

It will be appreciated that layers, features, elements, etc. depictedherein are illustrated with particular dimensions relative to oneanother, such as structural dimensions or orientations, for example, forpurposes of simplicity and ease of understanding and that actualdimensions of the same differ substantially from that illustratedherein, in some embodiments. Additionally, a variety of techniques existfor forming the layers features, elements, etc. mentioned herein, suchas etching techniques, implanting techniques, doping techniques, spin-ontechniques, sputtering techniques such as magnetron or ion beamsputtering, growth techniques, such as thermal growth or depositiontechniques such as chemical vapor deposition (CVD), physical vapordeposition (PVD), plasma enhanced chemical vapor deposition (PECVD), oratomic layer deposition (ALD), for example.

Moreover, “exemplary” is used herein to mean serving as an example,instance, illustration, etc., and not necessarily as advantageous. Asused in this application, “or” is intended to mean an inclusive “or”rather than an exclusive “or”. In addition, “a” and “an” as used in thisapplication and the appended claims are generally be construed to mean“one or more” unless specified otherwise or clear from context to bedirected to a singular form. Also, at least one of A and B and/or thelike generally means A or B or both A and B. Furthermore, to the extentthat “includes”, “having”, “has”, “with”, or variants thereof are used,such terms are intended to be inclusive in a manner similar to the term“comprising”. Also, unless specified otherwise, “first,” “second,” orthe like are not intended to imply a temporal aspect, a spatial aspect,an ordering, etc. Rather, such terms are merely used as identifiers,names, etc. for features, elements, items, etc. For example, a firstelement and a second element generally correspond to element A andelement B or two different or two identical elements or the sameelement.

Also, although the disclosure has been shown and described with respectto one or more implementations, equivalent alterations and modificationswill occur to others skilled in the art based upon a reading andunderstanding of this specification and the annexed drawings. Thedisclosure comprises all such modifications and alterations and islimited only by the scope of the following claims. In particular regardto the various functions performed by the above described components(e.g., elements, resources, etc.), the terms used to describe suchcomponents are intended to correspond, unless otherwise indicated, toany component which performs the specified function of the describedcomponent (e.g., that is functionally equivalent), even though notstructurally equivalent to the disclosed structure. In addition, while aparticular feature of the disclosure may have been disclosed withrespect to only one of several implementations, such feature may becombined with one or more other features of the other implementations asmay be desired and advantageous for any given or particular application.

What is claimed is:
 1. A method, comprising: forming a gate over a firstfin, a second fin, and an isolation material separating the first finfrom the second fin; forming a first metal connect over a source/drainregion of the first fin and a second metal connect over a source/drainregion of the second fin, wherein the second metal connect is physicallyseparated from the first metal connect; and forming a third metalconnect over the first metal, the second metal connect, and theisolation material, wherein the third metal connect electrically couplesthe first metal connect to the second metal connect.
 2. The method ofclaim 1, wherein: the first metal connect is separated from the secondmetal connect by a first dielectric layer, and the method comprises:forming a second dielectric layer over the first dielectric layer, thefirst metal connect, and the second metal connect; and forming anopening in the second dielectric layer to expose the first metal connectand the second metal connect, and forming the third metal connectcomprises forming the third metal connect in the opening.
 3. The methodof claim 2, wherein forming the opening comprises exposing a portion ofthe first dielectric layer extending between the first metal connect andthe second metal connect.
 4. The method of claim 1, wherein the thirdmetal connect electrically couples the source/drain region of the firstfin to the source/drain region of the second fin by way of the firstmetal connect and the second metal connect.
 5. The method of claim 1,comprising: forming a dielectric layer over the gate, the first metalconnect, and the second metal connect; forming a first opening in thedielectric layer to expose the gate; forming a second opening in thedielectric layer to expose the first metal connect and the second metalconnect, wherein forming the third metal connect comprises forming thethird metal connect in the second opening; and forming a metal contactin the first opening.
 6. The method of claim 5, wherein: forming thefirst opening comprises forming the first opening to overlie theisolation material, and forming the second opening comprises forming thesecond opening to overlie the first fin, the isolation material, and thesecond fin.
 7. The method of claim 1, wherein forming the third metalconnect comprises: forming a first metal layer; and forming a secondmetal layer over the first metal layer, wherein a material compositionof the first metal layer is different than a material composition of thesecond metal layer.
 8. The method of claim 7, wherein the first metallayer is titanium and the second metal layer is titanium nitride.
 9. Themethod of claim 7, wherein forming the third metal connect comprises:forming a third metal layer over the second metal layer, wherein amaterial composition of the third metal layer is different than thematerial composition of the first metal layer and is different than thematerial composition of the second metal layer.
 10. The method of claim9, wherein the third metal layer is tungsten.
 11. A method, comprising:forming a first metal connect in a first dielectric layer; forming asecond metal connect in the first dielectric layer, wherein the firstmetal connect is separated from the second metal connect by a portion ofthe first dielectric layer; forming a second dielectric layer over thefirst dielectric layer, the first metal connect, and the second metalconnect; forming a first opening in the second dielectric layer, whereinthe first opening extends over the portion of the first dielectric layerand exposes the first metal connect and the second metal connect; andforming a third metal connect in the first opening, wherein the thirdmetal connect electrically couples the first metal connect to the secondmetal connect.
 12. The method of claim 11, wherein: forming the firstmetal connect comprises forming the first metal connect over a firstsource/drain region, and forming the second metal connect comprisesforming the second metal connect over a second source/drain region. 13.The method of claim 12, wherein the third metal connect electricallycouples the first source/drain region to the second source/drain regionby way of the first metal connect and the second metal connect.
 14. Themethod of claim 11, wherein: the first metal connect overlies a firstfin, the second metal connect overlies a second fin, and the methodcomprises: forming a gate over the first fin and the second fin.
 15. Themethod of claim 14, comprising: forming a second opening in the seconddielectric layer to expose the gate.
 16. The method of claim 15,comprising: forming a metal contact in the second opening.
 17. Themethod of claim 15, wherein: the gate comprises a gate electrode and ahard mask, and forming the second opening comprises forming the secondopening through the hard mask to expose the gate electrode.
 18. Amethod, comprising: forming a first metal connect in a first dielectriclayer, the first metal connect contacting a first set of source/drainregions; forming a second metal connect in the first dielectric layer,the second metal connect contacting a second set of source/drainregions; forming a gate in the first dielectric layer, the gateoverlying a first set of channel regions adjacent the first set ofsource/drain regions and a second set of channel regions adjacent thesecond set of source/drain regions; and forming a third metal connectover the first metal connect and the second metal connect, wherein thethird metal connect electrically couples the first metal connect to thesecond metal connect.
 19. The method of claim 18, comprising: forming asecond dielectric layer over the first metal connect, the second metalconnect, the gate, and the first dielectric layer; and forming a firstopening in the second dielectric layer, wherein forming the third metalconnect comprises forming the third metal connect in the first opening.20. The method of claim 19, comprising: forming a second opening in thesecond dielectric layer over the gate; and forming a metal contact inthe second opening.